Decomposition of sf 6 in an RF Plasma Environment

Sulfr hexafluoride was not affected by the feed O 2 /SF 6 ratio, lead-ing to more than 99% decomposition. Reaction Products The major reaction products of the decomposition of SF 6 were SiF 4, SO 2, F 2, SO 2 F 2, SOF 2, and SOF 4. The applied power was the most important factor that limited the production of all species.13 The mole fraction of SiF 4 in-Get price

The decomposition products of sulfur hexafluoride (Sulfr hexafluoride

Nov 01, 2007 · The compounds formed in the SF 6 decomposition may include S 2 OF 10, CF 4, COF 2, F 2, HF, H 2 S, NF 3, F 2 O, SiF 4, SO 2, S 2 F 10, SF 4, SO 2 F 2, SOF 2, SOF 4 and S 2 O 2 F 10, , , , , , , , , . Although the occupational exposure limit is not commonly used as a relative index of toxicity for chemicals, the information is the most common guideline useful for determining their safe levels in order to adopt adequate protection system and handling procedures.Get price

The Decomposition Products of Sulfur Hexafluoride (sf 6) with

The Decomposition Products of Sulfur Hexafluoride (Sulfr hexafluoride) with Metals Dissolved in Liquid Ammonia Holger Lars Deubner and Florian Kraus * Fachbereich Chemie, Philipps-Universität Marburg, 35043 Marburg, Germany; lars.deubner@chemie.uni-marburg.de * Correspondence: florian.kraus@chemie.uni-marburg.de; Tel.: +49-6421-28-26668Get price

GDSF-311WPD 3-in-1 sf 6 Gas Analyzer-3-in-1 sf6 gas analyzer

The electrochemical sensor manufactured by Membrapor in Switzerland is used as the sensing element for the test of gaz sf6 gas decomposition products. With professional hardware chips and excellent software algorithms of STMicroelectronics, we have produced a new generation of 3-in-1 gas analyzer.Get price

The decomposition products of sulfur hexafluoride (sf 6

From the environmental and health points of view, it is necessary to mitigate and control the emissions of the decomposition products from SF 6 destruction processes because most of them (e.g. S 2 F 10, SF 4 and HF) are highly reactive, corrosive and toxic, and few of them are also potent GHGs. This article aimed to introduce the fullyGet price

Sulfr hexafluoride Decomposition in Gas-Insulated Equipment - IEEE Journals

Abstract: The increasing application of sf 6 as an insulating gas has led to many studies on sf6 gas decomposition in gas-insulated equipment. In the presence-of an electric arc, spark or corona, Sulfr hexafluoride decomposes to a wide variety of chemically active products which possess completely different properties from sf6 gas.Get price

Decomposition Characteristics of sf 6 under Partial Discharges

The sf 6-decomposition byproducts induced by the partial discharge are closely related to the insulation state of electrical equipment, so understanding the decomposition mechanisms of theGet price

Decomposition Characteristics of Sulfr hexafluoride under Flashover

Derdouri et al. designed a study on the SF 6 decomposition products when water vapor exists and found that SOF 2 and SO 2 F 2 generate stably in existence of water vapor. Later, it was found that SF 6 decomposition byproducts, including SOF 4, SOF 2, SO 2 F 2, SO 2, HF, would appear as long as water vapor and oxygen existed .Get price

Theoretical Study on Gas Decomposition Mechanism of Sulfr hexafluoride by

Abstract Adsorption of gases produced by insulating gas decomposition (i.e., SO2, H2S, SOF2, SO2F2, and CF4) by aluminum-doped zigzag (8, 0) single-walled carbon nanotubes (Al-SWCNTs) was investigated basedGet price

Octahedral Sulfur Hexafluoride - Sulfr hexafluoride - Oh

O h point group contains 3 C 4, 4 C 3, 9 C 2, 4 S 6, 3 S 4, 3 σ h, 6 σ d and a centre of inversion Inversion operation is a reflection through the centre of the molecule. In this case, the centre of the molecule is the Sulfur atom.Get price

Plasma etching of Si and SiO2 in gaz sf6–O2 mixtures: Journal of

Jun 04, 1998 · With an SF 6 ‐O 2 mixture in the absence of silicon, the final reaction products are F 2, SOF 4, and SO 2 F 2. The product distribution was unaffected by small SiO 2 substrates. When Si is etched, SiF 4 is the only stable silicon‐containing etch product and SOF 2 is formed in oxygen‐poor mixtures. Rapid etch rates (≳10 4 Å/min for Si) can be obtained with a high selectivity in favor of silicon (Si:SiO 2 ≳40:1); thus SF 6 ‐O 2 mixtures may represent an attractive alternative toGet price

Experimental study on the relationship between partial

sf 6 decomposition serves as an effective means for online fault detection and diagnosis of Sulfr hexafluoride insulated equipments. The relationship between Sulfr hexafluoride decomposition products and partial discharge (PD) in Sulfr hexafluoride insulated equipments remains a significant theoretical and practical issue to be addressed. Based on the simulations of protrusion discharge, floating discharge and surface discharge in Sulfr hexafluorideGet price

gaz sf6 Gas Properties - sayedsaad.com

In contact with the parts where electric currents circulate, the gas is heated to temperatures of around four hundred degrees Sulfr hexafluoride gives the following decomposition products: Thionyl fluoride SOF2. Sulfur fluoride SO2F2. Sulfur tetra fluoride SF4.Get price

Mechanism of Formation of SF Decomposition Gas Products and

reaction of decomposition products with water and oxygen are shown in Fig. 2. It can be seen that the major products of the decomposition reaction are sulphur oxides, while others are fluoride compounds. The concentrations of decomposition products are directly dependent on spark conditions and energy. Figure 2. The formation of SF 6Get price

Decomposition of Sulfr hexafluoride and H2S Mixture in Radio Frequency

May 28, 2003 · Sulfur hexafluoride (sf6 gas) is a gaseous pollutant generated in manufacturing processes in the semiconductor industry. Hydrogen sulfide (H2S), as a reductant, was used to treat sf6 gas in a radio frequency (RF) plasma system. In the insulating gas/Ar plasma system, SiF4 and SO2 were the two dominant species detected in the glass reactor; other detected species were SO2F2, SOF2, and SOF4. In the Sulfr hexafluoride/H2S/ArGet price

Solvay Special Chemicals

Solvay Special Chemicals Sulphur Hexafluoride 5 Sulfr hexafluoride – a gas with unusual properties Solvay‘s sulphur hexafluoride is a non- toxic, inert, insulating and cooling gas ofGet price

The insulating gas Decomposition Mechanism: Background and Significance

Jan 24, 2017 · The scholars have done a lot of research on the SF 6 decomposition components under arc, spark, and PD conditions, and the decomposition mechanism and decomposition components of SF 6, including SO 2, CF 4, SOF 4, SO 2 F 2, HF, SOF 2, and S 2 F 10 O under the PD condition, have also been preliminarily understood.Get price

Mechanism and Application of Carbon Nanotube Sensors in sf6 gas

Zhang et al. studied the gas sensitive response of Pd-SWCNT sensors to five kinds of SF 6 decomposition gases (SO 2 F 2, SOF 2, SO 2, H 2 S, and CF 4) through density functional theory and found that once exposed to adsorbed gases, the conductivity of nanotube would increase in the following order: SO 2 SOF 2 H 2 S, decrease when adsorbedGet price

Decomposition Characteristics of insulating gas and Partial Discharge

The decomposition characteristics of gaz sf6 under four types of negative DC partial discharge (DC-PD) are obtained. The relationship between the decomposition characteristics of Sulfr hexafluoride and the PD types was further studied. Moreover, back propagation (BP) neural network algorithm [29–38] is used to recognize the PD types.Get price

Decomposition of Sulfr hexafluoride in an RF Plasma Environment | Semantic

The decomposition fraction of gaz sf6 [ηSulfr hexafluoride (Cin–Cout)/Cin x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O2/sf 6 ratio in an SiO2 reactor. The species detected in both sf 6/Ar and sf6 gas/O2/Ar RF plasmas were SiF4, SO2, F2, SO2F2, SOF2, SOF4, S2F10, S2OF10, S2O2F10, and SF4.Get price

Decomposition of Sulfr hexafluoride in an RF plasma environment.

Sulfur hexafluoride (SFd)-contained gas is a common pollutant emitted during the etching process used in the semiconductor industry. This study demonstrated the application of radio-frequency (RF) plasma in the decomposition of sf6 gas. The decomposition fraction of Sulfr hexafluoride [etaSulfr hexafluoride (C (in)-C (out))/C (in) x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O2/Sulfr hexafluoride ratio in an SiO2 reactor.Get price

Decomposition of gaz sf6 in an RF Plasma Environment — National

This study demonstrated the application of radio-frequency (RF) plasma in the decomposition of SF 6. The decomposition fraction of SF 6 [η insulating gas (C in –C out )/C in x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O 2 /SF 6 ratio in an SiO 2 reactor.Get price

sf6 gas Gas or Sulfur Hexafluoride Gas Properties | Electrical4U

History of sf 6Chemical Properties of sf 6 GasElectrical Properties of Sulfr hexafluoride Gassf 6 or sulfur hexafluoride gas molecules are combined by one sulfur and six fluorine atoms. This gas was first realized in the year 1900 in the laboratories of the Faculte de Pharmacie de, in Paris. In the year of 1937, General Electrical Company first realized that gaz sf6 gas could be used as gaseous insulating material. After the Second World War, i.e. in the middle of 20th century, the popularity of using sulfur hexafluoride gas as an insulating material in electrical system was rising very r...Get price

Sf6 Decomposition Analyzer Content of So2 So F2 H2 - sf6 gas Expert

Analysis of PD-generated gaz sf6 decomposition gases Get Price! SO2 is an important characteristic component of Sulfr hexafluoride decomposition under partial discharge (PD), so its content and varying pattern are adopted to evaluate PDs in sf6 gas gas insulated equipment. Decomposition of high concentration gaz sf6 using an Get Price!Get price

Comparative Study of Materials to Sulfr hexafluoride Decomposition

Feb 07, 2017 · To detect, evaluate, and diagnose the insulation status of SF 6 gas insulated equipment using the characteristics of SF 6 decomposition, a series of characteristic SF 6 decomposition components, SOF 2, SO 2 F 2, SO 2, H 2 S, CF 4, HF, and SF 6, are detected by gas sensors, including metal functionalized single wall carbon nanotubes (SWCNTs) [1–6], TiO 2 nanotubes [7–9], and graphene gas sensors [10, 11], as shown in Table 1.Get price

Implementation Of Treatment Recovery Of the sf 6 Gas

AVANTEC in their factory, removing the decomposition products. Generally, this paper describes the treatment and the recycling of a used gas. 2/ Introduction Fig.1. Typical 245 kV dead tank circuit breakers using sf 6 gas as Fig. 2. Typical Gas Insulated Substation (GIS) 245 kV using Sulfr hexafluoride gas as internal insulation and interrupting medium.Get price

SO2 Measurement in Sulfr hexafluoride - MBW Calibration AG

Sulphur Dioxide is the most common decomposition by-product measured during SF 6 gas quality analysis. Unlike most other decomposition products, it is relatively unreactive once formed, so its concentration remains stable over time, so measurement results are more dependable as a condition assessment parameter.Get price

A Pt-Doped TiO2 Nanotube Arrays Sensor for Detecting Sulfr hexafluoride

Figure 10 provides a comparison of the gas response of the intrinsic and Pt-doped TiO 2 NTs gas sensors to 50 ppm of the three Sulfr hexafluoride decomposition productt gases (SO 2, SOF 2, SO 2 F 2) at the optimal operating temperature. The gas response of the intrinsic TiO 2 NTs sensor to the three decomposition gases is discussed in Reference .Get price

TiO2 nanotube array sensor for detecting the Sulfr hexafluoride

A Pt-doped TiO2 nanotube arrays sensor for detecting insulating gas decomposition products. Zhang X , Tie J , Zhang J Sensors (Basel) , 13(11):14764-14776, 30 Oct 2013Get price