The impact of decomposition products in SF 6 on the

decomposition products resulting from partial discharges [6]. The following study presents a report on the results of tests in which SF 6-decomposition products are produced through partial discharges, and interactions with electrically stressed epoxy resin surfaces are enabled. 1. Experimental set-up and realisationGet price

Decomposition of sf6 gas in an RF Plasma Environment

insulating gas was not affected by the feed O 2 /SF 6 ratio, lead-ing to more than 99% decomposition. Reaction Products The major reaction products of the decomposition of SF 6 were SiF 4, SO 2, F 2, SO 2 F 2, SOF 2, and SOF 4. The applied power was the most important factor that limited the production of all species.13 The mole fraction of SiF 4 in-Get price

The decomposition products of sulfur hexafluoride (insulating gas

Nov 01, 2007 · The compounds formed in the SF 6 decomposition may include S 2 OF 10, CF 4, COF 2, F 2, HF, H 2 S, NF 3, F 2 O, SiF 4, SO 2, S 2 F 10, SF 4, SO 2 F 2, SOF 2, SOF 4 and S 2 O 2 F 10, , , , , , , , , . Although the occupational exposure limit is not commonly used as a relative index of toxicity for chemicals, the information is the most common guideline useful for determining their safe levels in order to adopt adequate protection system and handling procedures.Get price

The decomposition products of sulfur hexafluoride (sf6 gas

Abstract. Sulfur hexafluoride (SF 6) is being widely used in a variety of industrial processes, commercial products and scientific fields due to its unique characteristics such as relatively low toxicity, extreme inertness and high dielectrics. However, the chemically stable gas is one of the most potent greenhouse gases (GHGs) that cause significantly global warming, and has been, thus, blanketed into the Kyoto Protocol.Get price

The Decomposition Products of Sulfur Hexafluoride (Sulfr hexafluoride) with

The Decomposition Products of Sulfur Hexafluoride (Sulfr hexafluoride) with Metals Dissolved in Liquid Ammonia Holger Lars Deubner and Florian Kraus * Fachbereich Chemie, Philipps-Universität Marburg, 35043 Marburg, Germany; * Correspondence:; Tel.: +49-6421-28-26668Get price

sf6 gas Decomposition in Gas-Insulated Equipment - IEEE Journals

Abstract: The increasing application of Sulfr hexafluoride as an insulating gas has led to many studies on Sulfr hexafluoride decomposition in gas-insulated equipment. In the presence-of an electric arc, spark or corona, gaz sf6 decomposes to a wide variety of chemically active products which possess completely different properties from Sulfr hexafluoride.Get price

Mechanism of Formation of SF Decomposition Gas Products and

reaction of decomposition products with water and oxygen are shown in Fig. 2. It can be seen that the major products of the decomposition reaction are sulphur oxides, while others are fluoride compounds. The concentrations of decomposition products are directly dependent on spark conditions and energy. Figure 2. The formation of SF 6Get price

Optical technology for detecting the decomposition products

Technology for Detecting Sulfr hexafluoride Decomposition Products. With the development of optical detection technology, researchers are pursuing higher detection accuracy, higher sensitivity, and faster detection time. Equally, it is hoped that the structure would be as simple and compact as possible for onsite or on-line monitoring.Get price

(PDF) Decomposition of SF 6 in an RF Plasma Environment

The decomposition fraction of Sulfr hexafluoride [etasf6 gas (C(in)-C(out))/C(in) x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O2/Sulfr hexafluoride ratio in an SiO2Get price

Decomposition Characteristics of sf 6 and Partial Discharge

The decomposition characteristics of Sulfr hexafluoride under four types of negative DC partial discharge (DC-PD) are obtained. The relationship between the decomposition characteristics of insulating gas and the PD types was further studied. Moreover, back propagation (BP) neural network algorithm [29–38] is used to recognize the PD types.Get price

Decomposition Characteristics of gaz sf6 under Flashover

Derdouri et al. designed a study on the SF 6 decomposition products when water vapor exists and found that SOF 2 and SO 2 F 2 generate stably in existence of water vapor. Later, it was found that SF 6 decomposition byproducts, including SOF 4, SOF 2, SO 2 F 2, SO 2, HF, would appear as long as water vapor and oxygen existed .Get price

Byproducts of Sulfur Hexafluoride (insulating gas) Use in the Electric

the decomposition products and concentrations formed under actual conditions can vary depending on the equipment used and the type of electrical discharge (CIGRE 1997). 1 CIGRE (the International Council on Large Electric Systems) is a permanent non-governmental and non­ profit-making international association based in France.Get price

Experimental study on the relationship between partial

Sulfr hexafluoride decomposition serves as an effective means for online fault detection and diagnosis of Sulfr hexafluoride insulated equipments. The relationship between insulating gas decomposition products and partial discharge (PD) in insulating gas insulated equipments remains a significant theoretical and practical issue to be addressed. Based on the simulations of protrusion discharge, floating discharge and surface discharge in sf6 gasGet price

gaz sf6 Gas Properties -

In contact with the parts where electric currents circulate, the gas is heated to temperatures of around four hundred degrees sf6 gas gives the following decomposition products: Thionyl fluoride SOF2. Sulfur fluoride SO2F2. Sulfur tetra fluoride SF4.Get price

Plasma etching of Si and SiO2 in sf6 gas–O2 mixtures: Journal of

Jun 04, 1998 · With an SF 6 ‐O 2 mixture in the absence of silicon, the final reaction products are F 2, SOF 4, and SO 2 F 2. The product distribution was unaffected by small SiO 2 substrates. When Si is etched, SiF 4 is the only stable silicon‐containing etch product and SOF 2 is formed in oxygen‐poor mixtures. Rapid etch rates (≳10 4 Å/min for Si) can be obtained with a high selectivity in favor of silicon (Si:SiO 2 ≳40:1); thus SF 6 ‐O 2 mixtures may represent an attractive alternative toGet price

Decomposing Mechanism of Sulfr hexafluoride under Positive DC Partial

The production rates of SF 6 decomposition components with trace H 2 O under PD can effectively represent the severity of discharge faults.Get price

Did anyone have experience in etching SiO2 with sf 6 in ICP

The gasese we have are: Sulfr hexafluoride(0-100sccm), O2(0-20sccm), Ar(0-5sccm), and C4F8. my sample is 3um SiO2 deposited on the surface of Si wafer. The recipe I designed for 3um SiO2 etching is:Get price

Decomposition of gaz sf6 and H2S Mixture in Radio Frequency

May 28, 2003 · Sulfur hexafluoride (sf 6) is a gaseous pollutant generated in manufacturing processes in the semiconductor industry. Hydrogen sulfide (H2S), as a reductant, was used to treat insulating gas in a radio frequency (RF) plasma system. In the insulating gas/Ar plasma system, SiF4 and SO2 were the two dominant species detected in the glass reactor; other detected species were SO2F2, SOF2, and SOF4. In the Sulfr hexafluoride/H2S/ArGet price

The insulating gas-ReUse-Process A contribution on the sustainability of SF

the used sf 6 is regenerated into new virgin gas. sf6 gas which has been regenerated by Solvay fulfills even a higher specification than that required by IEC 60376, as illustrated in Table 1. In order to be able to transform the used SF. 6 . gas back into new virgin SF. 6 . the used gas must fulfill the so-called SF. 6 – ReUse – Specification inGet price

Experimental Study on Competitive Adsorption of Sulfr hexafluoride

Zhang X, Zhang J, Jia Y, Peng X, Ju T (2012) TiO2 Nanotube array sensor for detecting the insulating gas decomposition product SO2. SensS 12:3302–3313 CrossRef Google Scholar.Get price

Sf6 Decomposition Analyzer Content of So2 So F2 H2 - Sulfr hexafluoride Expert

SO2 is an important characteristic component of sf 6 decomposition under partial discharge (PD), so its content and varying pattern are adopted to evaluate PDs in Sulfr hexafluoride gas insulated equipment. Decomposition of high concentration Sulfr hexafluoride using an Get Price! However, poisoning of catalysts by sulfur (S)-containing species needs further investigation. sf 6 is mainly converted to SOF2, SO2F4, sulfur dioxide (SO2), oxygen difluoride (OF2), and fluoride (F-2). Procedures for Sulfur Isotope AbundanceGet price

Decomposition of Sulfr hexafluoride Under AC and DC Corona Discharges in

Abstract. Sulphur hexafluoride (SF 6) is the gaseous dielectric the most widely used in high-voltage and very-high-voltage electrical equipment.As SF 6 is a synthetic gas that is expensive and could have a non negligible impact on environment, the current trend is to reduce its quantity in electrical equipment by mixing it with natural gases such as air or N 2.Get price

Implementation Of Treatment Recovery Of the Sulfr hexafluoride Gas

AVANTEC in their factory, removing the decomposition products. Generally, this paper describes the treatment and the recycling of a used gas. 2/ Introduction Fig.1. Typical 245 kV dead tank circuit breakers using insulating gas gas as Fig. 2. Typical Gas Insulated Substation (GIS) 245 kV using sf6 gas gas as internal insulation and interrupting medium.Get price

Theoretical study of the decomposition mechanism of Sulfr hexafluoride/Cu

Sep 10, 2018 · The compositions of SF 6 arc plasma are contaminated by Cu vapor through electrode erosion and thus affect the performance of the high-voltage SF 6 circuit breaker. But the essential data for chemical kinetic models to study the non-equilibrium compositions of SF 6 /Cu mixtures, namely the decomposition mechanism of SF 6 /Cu mixtures, is still not clear.Get price

Application of non-gaz sf6 gases or gas-mixtures in medium

This Technical Brochure describes the needs for adaptations or new requirements for the safe, reliable and sustainable application of non-insulating gas gases and gas mixtures in gas-insulated switchgear. It describes the given and available properties of the non-sf6 gas gases and gas-mixtures which have been investigated and applied to gas-insulated switchgear in MV and HV. This Technical Brochure alsoGet price

Comparative Study of Materials to gaz sf6 Decomposition

Feb 07, 2017 · To detect, evaluate, and diagnose the insulation status of SF 6 gas insulated equipment using the characteristics of SF 6 decomposition, a series of characteristic SF 6 decomposition components, SOF 2, SO 2 F 2, SO 2, H 2 S, CF 4, HF, and SF 6, are detected by gas sensors, including metal functionalized single wall carbon nanotubes (SWCNTs) [1–6], TiO 2 nanotubes [7–9], and graphene gas sensors [10, 11], as shown in Table 1.Get price

Sulfr hexafluoride decomposition components under different metallic free

The change rules of five main characteristic decomposition components, namely, CF 4, CO 2, SOF 2, SO 2 F 2, and SO 2, under different free‐conducting metal particles were obtained using gas chromatography–mass spectrometry quantitative detection.Get price

Analysis of Sulfr hexafluoride/N2 gas mixture decomposition by-products in

Two methods have been carried out for the analysis of Sulfr hexafluoride/N2 gas mixture decomposition by-products in electric discharges: infrared spectroscopy and gas chromatography. The infrared spectroscopy is a rapid method from which we can have qualitative analysis about all the products in a mixture, except those having the same absorption lines.Get price

Theoretical study of the decomposition mechanism of sf6 gas/Cu

the decomposition mechanism of SF/Cu mixtures is still not clear, which severely hinders the application of the analysis method of SF 6 decomposition byproducts in PD diagnosis and electric life evaluation for SF 6 circuit breaker. As mentioned above, the decomposition mechanism of SF 6/Cu mixtures is fundamental to any attempt to model theGet price