Byproducts of Sulfur Hexafluoride (gaz sf6) Use in the Electric

the decomposition products and concentrations formed under actual conditions can vary depending on the equipment used and the type of electrical discharge (CIGRE 1997). 1 CIGRE (the International Council on Large Electric Systems) is a permanent non-governmental and non­ profit-making international association based in France.Get price

Decomposition of gaz sf6 in an RF Plasma Environment

Sulfr hexafluoride was not affected by the feed O 2 /SF 6 ratio, lead-ing to more than 99% decomposition. Reaction Products The major reaction products of the decomposition of SF 6 were SiF 4, SO 2, F 2, SO 2 F 2, SOF 2, and SOF 4. The applied power was the most important factor that limited the production of all species.13 The mole fraction of SiF 4 in-Get price

The decomposition products of sulfur hexafluoride (sf6 gas

Abstract. Sulfur hexafluoride (SF 6) is being widely used in a variety of industrial processes, commercial products and scientific fields due to its unique characteristics such as relatively low toxicity, extreme inertness and high dielectrics. However, the chemically stable gas is one of the most potent greenhouse gases (GHGs) that cause significantly global warming, and has been, thus, blanketed into the Kyoto Protocol.Get price

Theoretical study of the neutral decomposition of sf 6 in the

Aug 26, 2016 · In the presence of H 2 O and O 2, the dissociation products of SF 6 will decompose to form several main stable byproducts (i.e. SOF 2, SOF 4 and SO 2 F 2) in an electrical discharGet price

Theoretical study of the neutral decomposition of insulating gas in the

Aug 26, 2016 · The chemical pathways and reactions in SF 6 neutral decomposition that generate stable decomposition products (e.g. SOF 2, SOF 4 and SO 2 F 2) were carefully investigated. The results will be presented in the remainder of this article. To assist the reader, the neutral decomposition schematic of SF 6 in the presence of H 2 O and O 2 isGet price

Sulfr hexafluoride Decomposition in Gas-Insulated Equipment - IEEE Journals

sf6 gas Decomposition in Gas-Insulated Equipment Abstract: The increasing application of gaz sf6 as an insulating gas has led to many studies on gaz sf6 decomposition in gas-insulated equipment. In the presence-of an electric arc, spark or corona, insulating gas decomposes to a wide variety of chemically active products which possess completely different properties from sf6 gas.Get price

The decomposition products of sulfur hexafluoride (Sulfr hexafluoride

Nov 01, 2007 · The compounds formed in the SF 6 decomposition may include S 2 OF 10, CF 4, COF 2, F 2, HF, H 2 S, NF 3, F 2 O, SiF 4, SO 2, S 2 F 10, SF 4, SO 2 F 2, SOF 2, SOF 4 and S 2 O 2 F 10, , , , , , , , , . Although the occupational exposure limit is not commonly used as a relative index of toxicity for chemicals, the information is the most common guideline useful for determining their safe levels in order to adopt adequate protection system and handling procedures.Get price

(PDF) Decomposition of SF 6 in an RF Plasma Environment

The decomposition fraction of gaz sf6 [etainsulating gas (C(in)-C(out))/C(in) x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O2/Sulfr hexafluoride ratio in an SiO2Get price

Mechanism of Formation of SF Decomposition Gas Products and

reaction of decomposition products with water and oxygen are shown in Fig. 2. It can be seen that the major products of the decomposition reaction are sulphur oxides, while others are fluoride compounds. The concentrations of decomposition products are directly dependent on spark conditions and energy. Figure 2. The formation of SF 6Get price

Plasma etching of Si and SiO2 in insulating gas–O2 mixtures: Journal of

Jun 04, 1998 · With an SF 6 ‐O 2 mixture in the absence of silicon, the final reaction products are F 2, SOF 4, and SO 2 F 2. The product distribution was unaffected by small SiO 2 substrates. When Si is etched, SiF 4 is the only stable silicon‐containing etch product and SOF 2 is formed in oxygen‐poor mixtures. Rapid etch rates (≳10 4 Å/min for Si) can be obtained with a high selectivity in favor of silicon (Si:SiO 2 ≳40:1); thus SF 6 ‐O 2 mixtures may represent an attractive alternative toGet price

The impact of decomposition products in SF 6 on the

decomposition products resulting from partial discharges [6]. The following study presents a report on the results of tests in which SF 6-decomposition products are produced through partial discharges, and interactions with electrically stressed epoxy resin surfaces are enabled. 1. Experimental set-up and realisationGet price

Decomposition Characteristics of gaz sf6 under Flashover

In this paper, the flashover discharging experiment was carried out on epoxy resin surface in an insulating gas atmosphere under pin-plate electrodes, with the electrodes distance from 5 mm to 9 mm. The concentration of seven characteristic gases was detected, indicating that the concentration of SOF2 and CF4 was the two highest, followed by SO2, CO2, SO2F2, CS2, and H2S. Based on the changes in theGet price

Decomposition Characteristics of Sulfr hexafluoride and Partial Discharge

The decomposition characteristics of Sulfr hexafluoride under four types of negative DC partial discharge (DC-PD) are obtained. The relationship between the decomposition characteristics of sf6 gas and the PD types was further studied. Moreover, back propagation (BP) neural network algorithm [29–38] is used to recognize the PD types.Get price

Experimental study on the relationship between partial

sf 6 decomposition serves as an effective means for online fault detection and diagnosis of Sulfr hexafluoride insulated equipments. The relationship between gaz sf6 decomposition products and partial discharge (PD) in insulating gas insulated equipments remains a significant theoretical and practical issue to be addressed. Based on the simulations of protrusion discharge, floating discharge and surface discharge in Sulfr hexafluorideGet price

Decomposition of Sulfr hexafluoride and H2S Mixture in Radio Frequency

May 28, 2003 · Sulfur hexafluoride (gaz sf6) is a gaseous pollutant generated in manufacturing processes in the semiconductor industry. Hydrogen sulfide (H2S), as a reductant, was used to treat sf6 gas in a radio frequency (RF) plasma system. In the Sulfr hexafluoride/Ar plasma system, SiF4 and SO2 were the two dominant species detected in the glass reactor; other detected species were SO2F2, SOF2, and SOF4. In the insulating gas/H2S/ArGet price

Decomposition Characteristics of sf6 gas under Partial Discharges

The insulating gas-decomposition byproducts induced by the partial discharge are closely related to the insulation state of electrical equipment, so understanding the decomposition mechanisms of theGet price

SimulationsofSiandSiO EtchinginSF +O Plasma

SimulationsofSiandSiO2 Etchingininsulating gas+O2 Plasma 481 with SF5 radicals (Eq. (1.3)). At 27% O2, the concen- tration of F atoms approaches the maximum value. At this point, almost all SF5 radicals in Sulfr hexafluoride + O2 plasmaGet price

Experimental Study on Competitive Adsorption of Sulfr hexafluoride

Zhang X, Zhang J, Jia Y, Peng X, Ju T (2012) TiO2 Nanotube array sensor for detecting the insulating gas decomposition product SO2. SensS 12:3302–3313 CrossRef Google Scholar.Get price

Decomposition of gaz sf6 in an RF plasma environment.

Sulfur hexafluoride (SFd)-contained gas is a common pollutant emitted during the etching process used in the semiconductor industry. This study demonstrated the application of radio-frequency (RF) plasma in the decomposition of gaz sf6. The decomposition fraction of sf6 gas [etagaz sf6 (C (in)-C (out))/C (in) x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O2/sf6 gas ratio in an SiO2 reactor.Get price

Thermal Decomposition Properties of Epoxy Resin in insulating gas - MDPI

As a promising alternative for pure insulating gas, the mixture of gaz sf6/N2 appears to be more economic and environment-friendly on the premise of maintaining similar dielectric properties with pure Sulfr hexafluoride. But less attention has been paid to the thermal properties of an sf 6/N2 mixture, especially with insulation materials overheating happening simultaneously. In this paper, thermal decomposition propertiesGet price

The sf 6 Decomposition Mechanism: Background and Significance

Jan 24, 2017 · Gas Insulated Switchgear (GIS) has been widely used in substations. The insulating medium used in GIS is sulfur hexafluoride (Sulfr hexafluoride) gas. However, the internal insulation defect existed in GIS would inevitably lead to partial discharge (PD), and cause the composition of Sulfr hexafluoride to SOF2, SO2F2 and SO2 and other characteristic component gases. The decomposition phenomenon would greatly reduce theGet price

Decomposing Mechanism of sf 6 under Positive DC Partial

Thus, gaz sf6 decomposition experiments under positive DC PD are performed to reflect the influence of H2O on insulating gas decomposition components. Results show that the total discharge quantity and the discharge repetition rate averaged for 1 s decrease slightly when the H2O content increases from 0 to 970 ppmv and then increase when the H2O content increases from 970 to 5120 ppmv.Get price

The gaz sf6-ReUse-Process A contribution on the sustainability of SF

the used gaz sf6 is regenerated into new virgin gas. insulating gas which has been regenerated by Solvay fulfills even a higher specification than that required by IEC 60376, as illustrated in Table 1. In order to be able to transform the used SF. 6 . gas back into new virgin SF. 6 . the used gas must fulfill the so-called SF. 6 – ReUse – Specification inGet price

Siemens develops Sulfr hexafluoride-free gas-insulated medium-voltage

This type-tested system is used to switch high currents at the primary distribution level. The single-pole encapsulated 8DAB 12 is a sf6 gas-free medium-voltage switchgear in the Siemens blue GIS portfolio. Switches and switchgear that use Sulfr hexafluoride as the insulating, switching, and extinguishing gas remain an important part of the Siemens portfolio.Get price

sf6 gas gas in medium-voltage switchgear | TD Guardian Articles

Sulfr hexafluoride is used extensively worldwide for low switching capacity switches. In these applications, sf 6 allows for extremely compact switching devices, sealed-for-life construction, and very low maintenance. Environmental issues In recent years, sf 6 has been widely discussed in the environmental arena. insulating gas is recognized as a very potent greenhouse gas.Get price

Comparative Study of Materials to sf 6 Decomposition

Feb 07, 2017 · To detect, evaluate, and diagnose the insulation status of SF 6 gas insulated equipment using the characteristics of SF 6 decomposition, a series of characteristic SF 6 decomposition components, SOF 2, SO 2 F 2, SO 2, H 2 S, CF 4, HF, and SF 6, are detected by gas sensors, including metal functionalized single wall carbon nanotubes (SWCNTs) [1–6], TiO 2 nanotubes [7–9], and graphene gas sensors [10, 11], as shown in Table 1.Get price

TechTopics No. 53 | TechTopics | Siemens USA

A CIGRE working group, WG23.02, studied SF 6 use in the electric industry, and estimated that the electrical emissions of sf6 gas gas into the atmosphere accounted for approximately 0.1 percent of the total global warming potential of gases in the atmosphere (as of 1999).Get price


Collisions of Sulfr hexafluoride' with N2 which result in the decomposition of gaz sf6' are obviously involved in such mixtures when used as gaseous insulators. Cross sections for electron attachment to Sulfr hexafluoride along with those associated with the decomposition of sf6 gas' can partially characterize the arc-quenching properties of the mixture, viz., the ability of theGet price

Collisional Decomposition of sf6 gas | NIST

Sep 01, 2000 · Abstract Insulating gas mixtures containing SF 6 have been promoted to serve as replacements for pure SF 6 in order to reduce SF 6 atmospheric emission. It has been argued that some synergism may be achieved by choosing proper buffer gases in mixtures with SF 6 such that the buffer gases efficiently slow down electrons into an energy range where the electron attachment cross section for SF 6Get price